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Specimen Preparation by Ion Milling for Transmission Electron Microscopy Investigations
Author Name : Dr. Nigvendra Kumar Sharma
ABSTRACT
Thin sheet, approximately 100 μm in thickness, of Aluminum, Lead, Zinc and Silicon were used for the study. The thickness of these sheetswas further reduced to the 60 μmusing a Disc Grinding and Polishing Machine. Later the discs having 3.05 mm diameter were cut from these sheets, using ultrasonic disc cutter. Then these discs were further thinned downby Dual Ion Milling Machine to the get the required thickness for TEM studies.
In this paper the author has focused on the preparation of specimen for TEM investigations from metallic sheets of Aluminum, Lead, Zinc and Silicon, by using Dual Ion Milling Machine.Efforts were made to find the optimum Ion Gun Voltage for preparation of the specimen from each of these metallic sheets and the results are reported in this paper.
Keywords: TEM; Specimen;Phase transformation; Dislocations; Stacking faults; Voids; Lattice parameters; Defects